OM-610-1002-1 Operator’s Manual Rev 37
PDS-2010 SECTION 6 MAINTENANCE page 41
8. Clean the housing, shaft, and spacers with solvent.
9. Install new bearings on the shaft, reuse the spacer removed in step 7, and secure with new retainer B.
10. Liberally coat the shaft and housing bore in the areas marked A with APIEZON-K vacuum oil.
11. Coat the new O-rings and spacer with APIEZON-K vacuum oil and install in the housing.
12. Press the shaft assembly in the housing and install new retaining ring A.
13. Clean the face and O-ring groove on the feed-thru and install a new O-ring on the feed-thru. Reinstall
in the chamber in the reverse order of removal.
6.3 PROCESS TEMPERATURE CONTROLLERS
The WEST process controllers used on the 2010 continually recalibrate themselves throughout operation and
are not subject to drift caused by ambient temperature variations. To verify the temperature controllers
(furnace, gauge tube, and vaporizer), follow section 6.3.1.
CAUTION: Procedures for verifying WEST 6100+ controllers on the 2010 require
powering the machine with one or more of the cabinet panels removed. This exposes high
voltage conductors and creates an electrical shock hazard. Calibration should be
performed by qualified and authorized personnel only.
Figure 9: Feed Thru
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