OM-610-1002-1 Operator’s Manual Rev 37
PDS-2010 SECTION 5 OPERATION page 23
For more information regarding the vacuum controller values, refer to the WEST controller and Granville-
Phillips gauge documentation provided in Section 6. Remember: The displayed process value is very near the
actual milliTorr value while in the range of process control (10 to 100 milliTorr).
The vacuum controller set point value is factory-set at 15 units above base pressure. By changing this setting
up or down, the process will speed up or slow down respectively. Take care not to set this value too high, as it
will result in cloudy coatings.
Background gasses from previous runs can contaminate the vacuum pump oil making the pump less effective
which will result in a slight rise in the system base pressure. To compensate for this, the set point value can be
incremented up. Doing this will readjust the coating cycle timing back to normal.
The output ‘1’ light indicates that the vacuum controller is attempting to cycle the vaporizer to maintain the
pressure set point value. This indicator must come on as one of the preconditions before coating begins. When
the red ALM light comes on, it indicates the end of the run.
5.5.4 Vaporizer Temperature Controller
The vaporizer controller displays the vaporizer temperature. The vaporizer set point value is 175°C. Do not
change this–this value protects the vaporizer from overheating at the end of a run. The output ‘1’ light is
always on except when the vaporizer is above its set point value.
In some applications, the initial rise (or overshoot) in chamber pressure may be unacceptable. These
applications include very thin round substrates (fine wire, needles, etc.). In these instances, the lower set
point on the vaporizer temperature controller (PhA2) automatically starts the vaporizer at a lower set
point, usually in the range from 110° – 120°C. After a sufficient amount of time (30 minutes) to allow the
chamber pressure to settle at its set point, the vaporizer is then automatically allowed to rise above the
lower set point, and will finish the run at 175°C. If your process does not require the lower set point,
simply set PhA2 on the vaporizer at 174°C (See Section 6.4 for instructions on how to adjust the lower set
point). This is part of the end-of-run condition: vaporizer temperature must be above PhA2 and pressure
must be below base to trigger end-of-run.
5.5.5 Alarm
The Alarm pushbutton enables the audio alarm signal. It is only illuminated in the case of a system fault
during a deposition cycle. The audio alarm can be silenced by depressing the alarm pushbutton.
The fault output will activate the red pushbutton light. The fault code can be determined by counting how
many times the red alarm light flashes. The red alarm light will continue to flash the code every 5 seconds. If
the fault condition is not rectified within 5 minutes, shutdown will occur.
Code number
Cause
3 Furnace temperature out of range.
2 Gauge tube temperature out of range.
1 Vaporizer temperature too high.
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