78
Corrections
7.1 fix leakage.
7.2 replace faulty vacuum pump/
7.3 fix leaking piping.
7.4 replace stuck non-return valve
7.5.1 Replace faulty coil and/or plunger.
7.5.2 Fix disconnection.
7.5.3 Replace faulty board.
7.5.4 Replace faulty board.
7.5.5 See item 10.4.8.
7.5.6 See item 10.4.35.
7.5.7 See item 10.4.30.
7.5.8 See item 10.4.29
Possible cause check-up and tests
7.1 Chamber is leaking.
7.2 Faulty vacuum pump.
7.3 Vacuum piping is leaking.
7.4 Non-return valve is stuck.
7.5 Vacuum valve (52) does not open during vacuum
stage due to:
7.5.1 Faulty coil or plunger.
7.5.2 Pump disconnected.
7.5.3 Faulty digital board DIG-T2 (located in
the electronic box).
7.5.4 Faulty analogue board ANL-T2 (located
in the electronic box).
7.5.5 Air inlet valve (43) leaks or is stuck open.
7.5.6 Fast exhaust valve (73) leaks or is stuck
open.
7.5.7 Slow exhaust valve (74) leaks or is stuck
open.
7.5.8 Steam valve (93) leaks or is stuck open.
10. TROUBLESHOOTING (cont.)
10.2 Preliminary Troubleshooting (cont.)
Symptom
7. “Low vacuum” is
displayed.
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