INSTALLATION  Series 
 
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Edition 2019-05-03  963283EA
 
 
 
Analog sensors: 
Sensor 1.Enable = 1 
Sensor 1.Range.Data Unit = Torr 
Sensor 1.Range.Upper Limit Data Value = 1.0 
Sensor 1.Range.Lower Limit Data Value = 0.0 
Sensor 1.Range.Upper Limit Voltage Value = 10.0 
Sensor 1.Range.Lower Limit Voltage Value = 0.0 
Sensor 1.Range.Scale = Linear 
Sensor 1.Input Source = Analog 
Sensor 2.Enable = 1 
Sensor 2.Range.Data Unit = mTorr 
Sensor 2.Range.Upper Limit Data Value = 100.0 
Sensor 2.Range.Lower Limit Data Value = 0.0 
Sensor 2.Range.Upper Limit Voltage Value = 10.0 
Sensor 2.Range.Lower Limit Voltage Value = 0.0 
Sensor 2.Range.Scale = Linear 
Sensor 2.Input Source = Analog 
 
   
0-10V (Analog interface) 
-100% 
100 mTorr 
0  mTorr 
0-10% 
-100%