上海维宏电子科技股份有限公司
SHANGHAI WEIHONG ELECTRONIC TECHNOLOGY CO., LTD.
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Y Direction in Coarse Positioning
Moving direction of Y-axis in coarse positioning stage during returning to the
machine origin.
1: Positive
-1: Negative
Default value: -1
Y Speed in Coarse Positioning
Feedrate of Y-axis in coarse positioning stage during returning to the machine
origin.
Range: [0.06, 9000]mm/min
Default value: 6000
Y Speed in Precision Positioning
Feedrate of Y-axis in fine positioning stage during returning to the machine origin.
Range: [0.06, 6000]mm/min
Default value: 600
Back Distance of Y
Y-axis additional displacement after fine positioning stage during returning to the
machine origin.
Positive value: Y-axis moving direction in retract stage is opposed to that in coarse
positioning stage.
Negative value: Y-axis moving direction in retract stage is the same with that in
coarse positioning stage.
Range: [-100, 1000]mm
Default value: 2
5.1.8 Origin Setting (Z)
Z Direction in Coarse Positioning
Moving direction of Z-axis in coarse positioning stage during returning to the
machine origin.
1: Positive
-1: Negative
Default value: 1
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