Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 1-19
Measurement Units
Voltage Monitor Unit (VMU)
NOTE High Impedance DUT
Very high impedance DUT may cause measurement error due to the input leakage
current from VMU.
To check the measurement error, perform voltage measurement as follows:
1. Connect SMU to the DUT.
2. Force very low current (under 1 pA) to the DUT from SMU.
3. Measure voltage by SMU.
4. Compare the voltage measured by SMU and VMU.
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