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4155B
Agilent Technologies 4155B User Manual
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User
’
s Guide
V
olu
me 2
Measurement and Analy
sis
Agile
nt
4155B
Se
miconduc
tor
Param
eter
Analyzer
Agile
nt
4156B
Precis
ion
Semi
conductor
Pa
rame
ter
Analyz
er
Agilent Part No.
04156-902
00
Printed in Japan
May 2
000
Edition 5
Silicon
Investigations
Repair
Information
-
Contact
Us
920-955-3693
www.siliconinvestigations.com
2
Table of Contents
Table of Contents
9
Edition
18
Measurement Units
19
Edition
19
Edition
20
Ground Unit (GNDU)
21
Source/Monitor Unit (SMU)
22
Voltage Source Unit (VSU)
34
Voltage Monitor Unit (VMU)
35
Pulse Generator Unit
38
Measurement Mode
41
Sweep Measurement Mode
43
Basic Sweep Measurement
44
Subordinate Sweep Measurement
47
Synchronous Sweep Measurement
49
Pulse Sweep Measurement
51
Available Units
54
Sampling Measurement Mode
54
Sampling Interval and Measurement Time
55
Sampling Measurement Data
58
Sampling Completion
60
Source Output Sequence and Time Origin
62
Linear Sampling Measurement
64
Thinned-Out Sampling Measurement
67
Logarithmic Sampling Measurement
70
Measurement Functions
75
Stress Force Function
77
Stress Output Channels
78
Stress Mode
80
Stress Force Sequence
81
Stress Stop Function at Abnormal Status
84
Available Units and Functions
85
Knob Sweep Function
85
Normal Sweep and Knob Sweep Measurements
86
Features of Knob Sweep Function
87
KNOB SWEEP Screen
90
SETUP COPY Softkey
91
Y-AXIS ASSIGN Softkey
91
DISPLAY SETUP Softkey
92
VAR1 SETUP Softkey
94
VAR2 SETUP Softkey
97
CONST SETUP Softkey
99
Analysis of the Knob Sweep Measurement Results
100
Standby Channels
101
Standby Function
101
Standby State
101
Available Units and Output Values
102
Output Values of Non-Standby Channels
102
Output Sequence of Standby Channels
103
When Getting Setup File
104
Idle State
105
Measurement State
105
Operation States
105
Changing Among Operation States
106
Standby State
106
Stress Force State
106
Output Sequence
108
Sequential Mode
109
Simultaneous Mode
111
Trigger Function
113
Trigger Input
115
Trigger Output
116
SMU/PG Selector Control
120
Restrictions Using Selector
121
Setup and Switching Conditions
121
Connections
122
R-BOX Control
122
Resistance Value
122
Setups
124
Circuit Diagram
125
Measurement Ranging Mode
127
Auto Ranging
128
Limited Auto Ranging
129
Compliance Range
130
Fixed Range
130
Compliance
131
Voltage and Current Compliance
131
Power Compliance
135
Integration Time
137
Short
137
Long
138
Medium
138
SMU Filter
139
To Measure Offset Data
140
Zero Offset Cancel
140
To Perform Offset Cancel
142
Making a Measurement
143
Connecting DUT
145
Using Test Fixture
146
Using Connector Plate
148
Sweep Measurements
152
To Define Measurement Units
154
To Set up Primary Sweep
156
To Set up Secondary Sweep
158
To Set up Synchronous Sweep
160
To Set up Constant Output
162
To Set up SMU Pulsed Output
163
To Set up PGU Output
166
To Use Standby Function
168
To Define a User Function
169
To Display Graphics Results
170
To Display List Results
172
To Execute Calibration
173
To Use Offset Cancel Function
173
To Execute or Stop Measurement
174
To Use R-Box
175
Knob Sweep Measurements
177
To Execute Knob Sweep Measurement
178
To Stop Knob Sweep Measurement
181
Sampling Measurements
182
To Define Measurement Units
184
To Set up Sampling Parameters
186
To Set up Constant Output
188
To Define Stop Conditions
189
Stress Force
191
To Set up Stress Source Channels
193
To Set up Stress Condition/Timing
195
To Set up Ac (Pulse) Output
197
To Set up DC Output
199
To Force Stress
200
To Use Selector
202
Analyzing Measurement Results
205
Manual Analysis
207
To Specify a Measurement Point on Curve
208
To Specify between Measurement Points on Curve
210
To Display or Move Cursor
212
To Adjust Display Range to Measurement Curve Automatically
213
To Zoom the Display Range
213
To Center Display at Cursor Location
214
To Draw Line through Two Specified Points
214
To Draw Line through Specified Point with Specified Gradient
216
To Draw Tangent to Specified Point of Measurement Curve
218
To Draw Regression Line for Specified Region
220
To Display and Select a Line
222
To Display Grid on the Graph
222
To Change Data Variable on Graph
223
To Change Range of X or y Axis Scale
224
To Change Variable Assigned to X, Y1, or Y2 Axis
225
To Overlay an Internal Memory Measurement Curve Onto Plotting Area
226
To Scroll the LIST Screen
228
To Display or Move Marker on LIST Screen
229
To Change Variables of LIST Screen
230
Automatic Analysis
231
To Draw Line by Specifying Two Points
232
To Draw Line by Specifying Gradient and One Point
234
To Draw Tangent to Specified Measurement Point
236
To Draw Regression Line by Specifying Two Points
238
To Display Marker at Specified Point
241
Screen Organization
243
Screen Structure
245
CHANNELS Screen Group
247
CHANNELS: CHANNEL DEFINITION Screen
248
CHANNELS: USER FUNCTION DEFINITION Screen
254
CHANNELS: USER VARIABLE DEFINITION Screen
256
MEASURE Screen Group
258
MEASURE: SWEEP SETUP Screen
259
MEASURE: SAMPLING SETUP Screen
264
MEASURE: PGU SETUP Screen
268
MEASURE: MEASURE SETUP Screen
271
Measurement Range
272
MEASURE: OUTPUT SEQUENCE Screen
274
DISPLAY Screen Group
277
DISPLAY: DISPLAY SETUP Screen for Graphic Results
278
DISPLAY: DISPLAY SETUP Screen for List Results
280
DISPLAY: ANALYSIS SETUP Screen
282
GRAPH/LIST Screen Group
288
On the GRAPHICS Result Screen
288
On the LIST Result Screen
288
GRAPH/LIST: GRAPHICS Screen
289
GRAPH/LIST: LIST Screen
304
Measurement Results
305
STRESS Screen Group
316
STRESS: CHANNEL DEFINITION Screen
317
STRESS: STRESS SETUP Screen
321
STRESS: STRESS FORCE Screen
325
Data Input or Edit
327
Screen Operation
327
Blue Front-Panel Key Usage
329
Green Front-Panel Key Usage
330
Edit Front-Panel Keys
331
Status Indicators
332
Data Variable and Analysis Function
333
Data Variable
335
Data Variable for Output or Measurement Data
335
User Function
337
User Variable
338
Syntax of Data Variable Name
339
Expression
340
Built-In Function
343
Abs
344
Avg
344
Cond
345
Delta
346
Diff
347
Exp
348
Integ
348
Lgt
349
Log
349
Mavg
350
Max
351
Min
351
Sqrt
351
Read out Function
352
Cy1
353
Cy2
353
Iy1
355
Iy2
355
L1Co
356
L1G
356
L1G1
357
L1G2
358
L1X
359
L1Y
359
L1Y1
359
L1Y2
359
L2Co
359
L2G
360
L2G1
361
L2G2
362
L2X
363
L2Y
363
L2Y1
363
L2Y2
363
My1
364
My2
364
Analysis Function
365
Marker on the GRAPH/LIST: GRAPHICS Screen
366
Marker on the GRAPH/LIST: LIST Screen
368
Cursor
370
Line Drawing
371
Scaling Functions
373
Automatic Analysis Function
374
Overlay Display Function
374
If You Have a Problem
375
When You Make a Measurement
378
If Measured Value Oscillates When Measuring High-Frequency Devices
379
If Measured Value Oscillates When Measuring Negative Resistance
380
If Noise Affects the Measured Values
381
If Large Current Causes High Temperature (Thermal Drift)
382
If Measured Voltage Has some Error When Forcing a Large Current
382
If Measurement Takes more Time than Specified
383
If Measurement Damages the Device under Test
384
If You Get Unexpected Data When Performing Sampling Measurement
386
If Errors Occur
387
If Errors Occur When You Perform Self-Calibration or Diagnostics
388
If Errors Occur When You Operate the 4155B/4156B
394
If a Measurement Data Status Is Displayed
412
4
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Agilent Technologies 4155B Specifications
General
Brand
Agilent Technologies
Model
4155B
Category
Measuring Instruments
Language
English
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