136 Troubleshooting and Maintenance Manual
7 Replacement Parts
Subpanel, rear upper G3850-67758
Panel bracket, right RIS G3850-67761
Panel, upper RIS G3850-67762
Octafluoronaphthalene, OFN, 100 fg/µL 5188-5348
PFTBA, 10 gram 8500-0656
Benzophenone, 100 pg/µL 8500-5440
PFTBA sample kit 05971-60571
Foreline pump tray G1099-00015
Rough pump oil pan G1946-00034
Eval A, hydrocarbons 05971-60045
Micro-Ion gauge electronics G3170-89001
J20’ 1/8-inch id stainless steel 7157-0210
Wipes (qty 300) 9310-4828
Swagelok ferrule, front, 1/8-inch, 10/package 5180-4110
Swagelok ferrule, rear, 1/8-inch, 10/package 5180-4116
Swagelok nut, for 1/8-inch fitting, 10/package 5180-4104
Swagelok nut and ferrules, 10 set/package 5080-8751
Tubing cutter for SS tubing 8710-1709
Tubing cutter replacement blades 8710-1710
Table 2 5 Miscellaneous parts and samples (continued)
Description Part number
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