Alicat MC Series User Manual

65
.125in
56.52mm
2.225in
3.18mm
.150in
3.81mm
.925in
23.50mm
8-32 UNC .175in[4.45mm]
8.53mm
.336in
.525in
13.34mm
1.050in
26.67mm
BOTH SIDES
(10-32 UNF)M5X0.8
8.53mm
.336in
.525in
13.34mm
DATE
1
MC-0.5SCCM-D-MSPEC
1/5/2016
REV.
3.897in
98.98mm
3.338in
84.77mm
MC-Series:
Upstream Valve
0 - 0.5 sccm
0 - 1 sccm
0 - 2 sccm
0 - 5 sccm
0 - 10 sccm
0 - 20 sccm
0 - 50 sccm
MC 0.5 sccm to 50 sccm approximate shipping weight: 1.1 lb.
0
MC-0.5SCCM-D-DS-MSPEC
1/30/2016
DATE
REV.
98.98mm
3.897in
84.77mm
3.338in
26.67mm
1.050in
13.34mm
.525in
8.53mm
.336in
M5X0.8 (10-32 UNF)
Both Sides
4.93mm
.194in
13.34mm
.525in
23.50mm
.925in
8-32 UNC .175in[4.45mm]
3.81mm
.150in
2.225in
56.52mm
3.18mm
.125in
MC-Series
Downstream Valve*
0 - 0.5 sccm
0 - 1 sccm
0 - 2 sccm
0 - 5 sccm
0 - 10 sccm
0 - 20 sccm
0 - 50 sccm
* Note process connection port locations for downstream valve in this ow range.
MC 0.5 sccm to 50 sccm approximate shipping weight: 1.1 lb.

Alicat MC Series Specifications

General

Brand	Alicat
Model	MC Series
Category	Controller
Language	English