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Technical Data for Alicat MCQ and MCRQ Mass Flow Controllers
0 to 0.5 sccm Full Scale through 0 to 3000 slpm Full Scale
Standard Operating Specications (Contact Alicat for available options)
Performance MCQ & MCRQ Mass Flow Controller
Accuracy at calibration
conditions after tare
± 2% of Full Scale
Repeatability ± 0.2% Full Scale
Zero Shift and Span Shift 0.02% Full Scale / ºCelsius / Atm
Operating Range / Turndown Ratio 2% to 100% Full Scale / 50:1 Turndown
Maximum Controllable Flow Rate 102.4% Full Scale
Maximum Measurable Flow Rate up to 128% Full Scale (Gas Dependent)
Typical Response Time 100 ms (Adjustable)
Warm-up Time < 1 Second
Communications / Power MCQ & MCRQ Mass Flow Controller
Monochrome LCD or Color TFT
Display with integrated touchpad
Simultaneously displays Mass Flow, Volumetric Flow, Pressure and Temperature
Digital Communications Options
1
RS-232 Serial, RS-485 Serial, DeviceNet, EtherCAT, EtherNet/IP,
Modbus RTU, Modbus TCP/IP, PROFIBUS
Analog Input/Output Signal
2
Options 0-5 Vdc / 1-5 Vdc / 0-10 Vdc / 4-20 mA
Optional Secondary Analog
Input/Output Signal
2
0-5 Vdc / 1-5 Vdc / 0-10 Vdc / 4-20 mA
Electrical Connection Options 8 pin Mini-DIN, 9 pin D-sub (DB9), 15 pin D-sub (DB15), 6 pin locking, 8 pin M12
Supply Voltage MCQ: 12 to 30 Vdc (15-30 Vdc for 4-20 mA outputs) MCRQ: 24 to 30 Vdc
Supply Current MCQ: 0.250 Amp MCR:Q 0.750 Amp (MCRQH: 2.0 Amp)
1. The Digital Output Signal communicates Mass Flow, Volumetric Flow, Pressure and Temperature
2. The Analog Output Signal and Optional Secondary Analog Output Signal communicate your choice of Mass
Flow, Volumetric Flow, Pressure or Temperature
Operating Conditions MCQ & MCRQ QMass Flow Controller
Mass Reference Conditions (STP) 25ºC & 14.696 psia (standard — others available on request)
Operating Temperature −10 to +60 ºCelsius
Humidity Range (Non–Condensing) 0 to 100%
Max. Internal Pressure (Static) 145 psig
Proof Pressure 175 psig
Mounting Attitude Sensitivity MCQ: None MCRQ: Mount with valve cylinder vertical & upright
Valve Type Normally Closed
Ingress Protection IP40
Wetted Materials
MC: 303 & 302 Stainless Steel, Viton®, Heat Cured Silicone Rubber, Glass Reinforced
Polyphenylene Sulde, Heat Cured Epoxy, Aluminum, Gold, Brass, 430FR Stainless
Steel, Silicon, Glass.
MCR: 303 & 302 Stainless Steel, Viton®, Heat Cured Silicone Rubber, Glass Rein-
forced Polyphenylene Sulde, Heat Cured Epoxy, Aluminum, Gold, 416 Stainless Steel,
Silicon, Glass. If your application demands a dierent material, please contact Alicat.
Range Specic Specications
Full Scale Flow Mass
Controller
Pressure Drop at FS Flow
(psid) venting to atmosphere
Mechanical
Dimensions
Process Connections
1
MCQ 0.5 sccm to 50 sccm 1.0 4.4”H x 3.4”W x 1.1”D
M-5 (10-32) Female Thread
2
MCQ 100 sccm to 500 sccm 1.0
4.6”H x 3.6”W x 1.1”D 1/8” NPT Female
MCQ 1 slpm 1.5
MCQ 2 slpm 3.0
MCQ 5 slpm 2.0
MCQ 10 slpm 5.5
MCQ 20 slpm 20.0
MCRQ 50 slpm 2.0
5.7”H x 7.7”W x 2.3”D 1/4” NPT Female
MCRQ 100 slpm 3.2
MCRQ 250 slpm 2.4 6.0”H x 7.7”W x 2.3”D 1/2” NPT Female
MCRQ 500 slpm 6.5
6.0”H x 7.3”W x 2.3”D
3/4” NPT Female
(A 1-1/4” NPT Female process
connection is available for
2000 slpm controllers.)
MCRQ 1000 slpm 14.0
MCRQ 1500 slpm 17.0
MCRQ 2000 slpm 28.6 6.0”H x 8.1”W x 2.9”D
MCRQH 3000 slpm 16.8 6.0”H x 8.9”W x 2.9”D 1-1/4” NPT Female
1. Compatible with Swagelok® tube, Parker®, face seal, push connect and compression adapter ttings. VCR and SAE
connections upon request.
2. Shipped with M-5 (10-32) Male Buna-N O-ring face seal to 1/8” Female NPT ttings.
Alicat MCQ and MCRQ units are for high pressure applications. The ow rate is dependent on the pressure in that lower
pressures will yield lower ow rates. The Q series should only be ordered after consulting Alicat. MCQ units are calibrated
for operation at high pressure. Optimal performance is achieved at higher operating pressures.
Minimum Operating Pressure – 30 psia Maximum Operating Pressure – 320 psia
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