Brooks 9600 - Page 16

1-4 ©2013 Brooks Automation Inc. Pub. No. 8040444, Rev. AA, 01/14/2013 ECO No. 63723
Figure 1-2: 9600 Compressor Dimensions
19.52 in.
(496 mm)
21.50 in.
(546 mm)
1.28
(32mm)
23.36 in.
(593 mm)
3.18 in.
(81 mm)
14.4 in.
(366 mm)
CAUTION
Do not place a weight greater than 75 lbs. (34Kg) on top of the
Compressor.