1-12 ©2013 Brooks Automation Inc. Pub. No. 8040444, Rev. AA, 01/14/2013 ECO No. 63723
Multiple On-Board Cryopump Connections
The On-Board Splitter Box permits the connection of multiple On-Board
Cryopumps or Waterpumps to one 9600 Compressor as shown in Figure 1-
5. Refer to “Section 3 - Installation” for more information on connecting
single or multiple On-Board Cryopumps or Waterpumps to the
Compressor.
Figure 1-5: 9600 Compressor Connected to Multiple On-Board Cryopumps
NOTE: Your installation (number of pumps per compressor) will vary
based upon the On-Board Cryopumps or Waterpumps used. Refer to
“Appendix A: Customer Brooks Automation Technical Support
Information” to consult your local BROOKS-CRYOGENICS Customer
Support Center for information on specific compressor/pump applications.
Multiple Cryo-Torr Cryopump Connections
The Cryo-Torr Interface permits the connection of multiple Cryo-Torr
Cryopumps to one Compressor as shown in Figure 1-6. Refer to “Section 3
- Installation” for more information on connecting single or multiple Cryo-
Torr Cryopumps to the Compressor.
SUPPLY
RETURN
WATER
POWER
On-Board Cryopump
Power Cable
On-Board
Splitter
Box
REMOTE
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