4-2 ©2013 Brooks Automation Inc. Pub. No. 8040444, Rev. AA, 01/14/2013 ECO No. 63723
NOTE: The use of a higher helium charge pressure for 50 HZ operation is
necessary in order to compensate for the slower speed at which the
compressor operates at 50 HZ. The ("OFF" Condition) charge level for
60 Hz remains at 240-250 PSIG.
5. If the ("OFF" Condition) helium charge pressure is not in the ranges
as indicated in Table 4-1, then adjust the charge pressure as
described in “Section 5 - Maintenance”.
Compressor Operation
The system may be operated once the helium charge pressure is correct.
Perform the following steps to start the compressor:
1. Set the System Circuit Breaker to the ON (UP) position.
2. Set the Control Circuit Breaker to the ON (UP) position.
3. Close all Cryopump gate valves.
4. Refer to the On-Board Module Programming and Operation
manual or Cryo-Torr Cryopump Installation and Service
manual (that came with your cryopump) and perform the cryopump
start-up procedure.
CAUTION
Exceeding the recommended system ("OFF" Condition) helium
charge pressure will result in the compressor and cryopump safety
relief valves opening and releasing excess helium gas.
CAUTION
While the 9600 Compressor is operating, the helium pressure gauge
indicator should never be in the red zone. If the gauge indicator is
below 65 psig, then the system must be checked for insufficient
helium or helium leaks. If the gauge indicator is above 160 psig, then
the system has been over pressurized. Refer to “Section 5 -
Maintenance”and either add or remove helium before operating the
9600 Compressor.
To Next Page
Loading...