©2013 Brooks Automation Inc. Pub. No. 8040444, Rev. AA, 01/14/2013 ECO No. 63723 4-3
Document Title
5. Once the second stage temperature for all cryopumps is below 17K,
record the compressor pressure gauge reading as the normal system
operating pressure.
NOTE: During compressor operation, the compressor gauge reads the
pressure of the gas entering the compressor prior to it being compressed.
6. Affix a copy of the data next to the compressor gauge on each
compressor. This data is to be verified for each tool installation and
whenever a configuration change is made affecting the amount of
system helium gas and line volume.
The compressor pressure reading will decrease from the normal system
operating pressure during cryopump regeneration or if fewer cryopumps
are being operated. These are normal variations in the compressor pressure
reading and should not be cause for concern.
If you have concerns about system performance changing, then check the
normal system operating pressure which was determined in “Compressor
Operation” in this section. If the normal system operating pressure is not
correct, check the system for leaks.
Once the leaks have been repaired, helium must be added to return the
system to normal operating system pressure as described in “Section 5 -
Maintenance”.
Replacement of Helium Circuit Components
On occasion, it may be necessary to replace components such as
cryopumps, helium gas lines or compressors, or change the configuration
of the system. Whenever any of these conditions occur, "OFF" Condition
Helium System Pressure Verification should be performed to ensure that
("OFF" Condition) helium pressure has not changed.
The use of a 9600 compressor on a manifold with other BROOKS-CRYOGENICS compressor
models requires a reduction of the helium charge pressure to 200 - 210 psig charge pressure to
avoid helium safety valves from inadvertently venting.
CAUTION
The use of several compressors on a single manifold feeding a
common supply header and a common return header requires special
precautions. Contact BROOKS-CRYOGENICS for a review of the
intended installation and for specific technical instructions.
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