3-14 ©2013 Brooks Automation Inc. Pub. No. 8040444, Rev. AA, 01/14/2013 ECO No. 63723
Multiple Cryo-Torr Cryopump Connections
CAUTION
Make sure the Compressor power is OFF before making any
connections to the rear panel.
Helium Line Connections
1. Connect the Supply and Return lines to the 9600 Compressor as
described in “Connecting/Disconnecting Helium Flex Lines” in
this section.
2. Connect the Gas Return Line to the customer supplied helium
manifold and then to the Gas Return connector on the Cryo-T
orr
Cryopump.
3. Connect the Gas Supply Line to the customer supplied helium
manifold and then to the Gas Supply connector on the Cryo-T
orr
Cryopump.
Power Cable Connections
1. Connect the Cryo-Torr power cable between the CR
YOPUMP
ELECTRICAL OUTLET on the rear panel of the Compressor
and the CRYOPUMP ELECTRICAL INPUT on the Cryo-Torr
Interface as shown in Figure 3-8 or Figure 3-9.
CAUTION
The use of several compressors on a single manifold feeding a
common supply header and a common return header requires special
precautions. Contact BROOKS-CRYOGENICS for a review of the
intended installation and for specific technical instructions.
The use of a 9600 compressor on a manifold with other
BROOKS-CRYOGENICS compressor models requires a reduction of
the helium charge pressure to 200 - 210 psig charge pressure to avoid
helium safety valves from inadvertently venting. Refer to “Section 4 -
Operation” and “Section 5 - Maintenance” for more information.
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