Brooks 9600 - Page 44

3-16 ©2013 Brooks Automation Inc. Pub. No. 8040444, Rev. AA, 01/14/2013 ECO No. 63723
Figure 3-9:
User Remote
(from vacuum system)
SUPPLY
RETURN
WATER
POWER
Remote
Cryopump Power
Cryo-Torr
Interface
Multiple Cryo-Torr Cryopump Installation