©2013 Brooks Automation Inc. Pub. No. 8040444, Rev. AA, 01/14/2013 ECO No. 63723 1-1
9600 Compressor Installation, Operation and Maintenance Instructions
Section 1 - 9600 Compressor Description
General
This manual provides the information required to install, operate, and
maintain the BROOKS-CRYOGENICS 9600 Compressor.
NOTE: All personnel with installation, operation, and maintenance
responsibilities should become familiar with the contents of both the 9600
Compressor Installation, Operation, Maintenance, and appropriate
cryopump manuals to ensure safe, high quality, and reliable system
performance.
CAUTION
Refer to “Appendix A: Customer Brooks Automation Technical
Support Information” to contact the local Customer Support Center for
information on connecting 9600 Compressors to a manifold with other
BROOKS-CRYOGENICS compressors.
Compressor Configurations
The 9600 Compressor supports either On-Board or Cryo-Torr Cryopumps.
For multiple cryopump installations, an On-Board Splitter Box or Cryo-
Torr Interface can be used for cold head power distribution that reduces
total cable requirements as shown in Figure 1-5 and Figure 1-6.
System Documentation
The manuals for a system cover two basic components: the cryopump and
the Compressor. A manual is shipped with each system component to
provide information for installation and operation of that component. A
loose-leaf binder with index tab separators is also provided so you can
compile a complete set of tabulated manuals.
BROOKS-CRYOGENICS Helium Refrigeration System
The operation of BROOKS-CRYOGENICS’ cryopumps is based upon a
closed loop helium expansion cycle. The system is made up of two major
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