Brooks 9600 - Specifications; Dimensions

©2013 Brooks Automation Inc. Pub. No. 8040444, Rev. AA, 01/14/2013 ECO No. 63723 1-3
9600 Compressor Installation, Operation and Maintenance Instructions
Figure 1-1: 9600 Compressor
Specifications
Dimensions
The dimensions of the Compressor are shown in Figure 1-2.
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