Brooks 9600 - Supply and Return Water Line Connections

3-2 ©2013 Brooks Automation Inc. Pub. No. 8040444, Rev. AA, 01/14/2013 ECO No. 63723
Figure 3-1: 9600 Compressor Installation Flowchart
Supply and Return Water
Line Connections
(refer to page 3-3)
Electrical Connections
(refer to page 3-4)
Phase Check
(refer to page 3-6)
Single Cryopump
Connections
(refer to page 3-8)
START
Refer to
“Section 4 - Operation”
END
Single or Multiple
Cryopump
Installation?
Multiple Cryopump
Connections
(refer to page 3-11)
Connect/Disconnect Helium
Flexlines
(refer to page 3-7)