Brooks 9600 - Maintenance; Scheduled Maintenance; Suggested Maintenance Equipment

©2013 Brooks Automation Inc. Pub. No. 8040444, Rev. AA, 01/14/2013 ECO No. 63723 5-1
Document Title
Section 5 - Maintenance
Scheduled Maintenance
Suggested Maintenance Equipment
It is recommended to have the following equipment and disposable
supplies available as listed in Table 5-1.
Table 5-1: Suggested Maintenance Equipment
Supply BROOKS-CRYOGENICS P/N
Helium, 99.999% pure -
Pressure regulator (0-3000/0-400 psi) Assy. 8031403
Helium charging line terminating in a 1/4-inch
female flare fitting
7021002P001
Lint-free gloves and cloth -
Oakite or equivalent detergent soap -
Denatured alcohol -
Refer to
“Appendix A: Customer Brooks Automation Technical Support Information”
and contact the local Customer Support Center to obtain the
BROOKS-CRYOGENICS parts listed in this table.