1-10 ©2013 Brooks Automation Inc. Pub. No. 8040444, Rev. AA, 01/14/2013 ECO No. 63723
Helium Pressure Gauge
The Helium Pressure Gauge indicates system ("OFF" Condition) helium
charge pressure when the Compressor and cryopumps are OFF and
Compressor suction or inlet pressure when the Compressor is ON. Refer to
Table 4-1 for the appropriate ("OFF" Condition) helium charge pressure.
Power Inlet
The Power Inlet is used to connect your power cable to the Compressor.
Refer to “Section 3 - Installation” for information on power cable
installation.
Return Gas Coupling
The Return Gas Coupling returns the helium, which has been cycled
through the cryopump, back to the Compressor. Refer to “BROOKS-
CRYOGENICS Helium Refrigeration System” in this section for more
information.
Cooling Water IN
The Cooling Water IN connector provides water to the Compressor from
your facility to cool the Compressor during operation. The connector
thread size is a 1/2 in. female pipe thread. The water must meet the
specifications outlined in Table 1-3. Refer to “Section 3 - Installation” for
more information on cooling water connections.
Cooling Water OUT
The Cooling Water OUT connector returns the water that has been used to
cool the Compressor to your facility. The connector thread size is a 1/2 in.
female pipe thread. Refer to “Section 3 - Installation” for more information
on cooling water connections.
Cryopump Electrical Outlet
The Cryopump Electrical Outlet provides power to a single On-Board or
Cryo-Torr Cryopump, an On-Board Splitter Box, or a Cryo-Torr Interface.
The Compressor requires the use of an On-Board Splitter Box or
To Next Page
Loading...