©2013 Brooks Automation Inc. Pub. No. 8040444, Rev. AA, 01/14/2013 ECO No. 63723 4-1
Document Title
Section 4 - Operation
Adjusting System Helium Pressure
Your BROOKS-CRYOGENICS high vacuum pump system is comprised
of several pressurized components i.e. compressor, flex lines, and
cryopumps. Each component is charged with helium before shipment.
After all cryopumps, helium lines, and manifolds are attached to the
compressor, the system ("OFF" Condition) helium charge pressure must
be verified before system operation. Once the ("OFF" Condition) helium
system pressure has been verified, the system is ready for operation. After
cooldown, the normal system operating pressure is recorded.
NOTE: The 9600 Compressor is designed for continuous operation and
should remain ON even when the cryopumps are in a regeneration cycle.
"OFF" Condition Helium System Pressure Verification
The proper system ("OFF" Condition) helium charge pressure is necessary
so that the cryopumps operate at maximum performance as well as to
assure that the compressor will operate below the maximum design motor
winding temperature which will maximize the life of the compressor
motor.
1. Make sure the Compressor and Cryopump(s) are OFF.
2. Make sure all system components are connected together as
described in “Section 3 - Installation”.
3. Allow all system components to acclimate to a temperature
between 60º F and 80º F (15.5º C - 26.6º C).
4. Read the compressor helium pressure gauge located on the
compressor rear panel as shown in Figure 1-4. Compare the gauge
reading to the appropriate 50/60 Hz line frequency value
(depending upon your system installation) indicated in
Table 4-1.
Table 4-1: 9600 Compressor Helium ("OFF" Condition) Charge
Line Frequency Helium ("OFF" Condition) Charge Pressure
60 Hz 240 - 250 psig (16.5 - 17.2 bars )
50 Hz 255 - 265 psig ( 17.6 -18.3 bars )
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