Brooks 9600 - Page 20

1-8 ©2013 Brooks Automation Inc. Pub. No. 8040444, Rev. AA, 01/14/2013 ECO No. 63723
Figure 1-4: 9600 Compressor Rear View Component Locations
Control Circuit
Breaker
System Circuit
Breaker
Power Inlet
Gas Charge
Flared Fitting
Helium
Pressure Gauge
Cryopump Electrical Outlet
Supply Gas
Coupling
Return Gas
Coupling
Cooling Water
OUT
Compressor
Remote
Connector
Rear Panel
Gas Charge
Control Valve
Cooling Water
IN
Elapsed Time
Meter
Power ON
Indicator