Brooks 9600 - Connecting;Disconnecting Helium Flex Lines; Connecting; Disconnecting

©2013 Brooks Automation Inc. Pub. No. 8040444, Rev. AA 01/14/2013 ECO No. 63723 3-7
Document Title
Connecting/Disconnecting Helium Flex Lines
Connecting
1. Remove all dust plugs and caps from the Gas Supply and
Return lines, and the Compressor and cryopump Supply and
Return connectors. Check for the presence of a flat gasket in
the male connector, and no gasket in the female connector.
2. Connect the Gas Return line to the GAS RETURN connector on the
rear of the Compressor and then to the GAS RETURN connector
on the cryopump. Using two wrenches as shown in Figure 3-3,
tighten the connector.
3. Connect the Gas Supply line to the GAS SUPPLY connector on the
rear of the Compressor and then to the GAS SUPPLY connector on
the cryopump. Using two wrenches as shown in Figure 3-3, tighten
the connector.
4. Attach the Supply and Return line identification labels to each end
of the appropriate lines.
Disconnecting
1. Using two wrenches as shown in Figure 3-3, disconnect the two
self sealing coupling connectors quickly to minimize helium
CAUTION
Make sure the helium flex lines are connected and disconnected from
the 9600 Compressor using the following procedure and as shown in
Figure 3-3. Failure to follow this procedure could damage connector
O-ring seals or cause a helium circuit leak.