©2013 Brooks Automation Inc. Pub. No. 8040444, Rev. AA 01/14/2013 ECO No. 63723 3-11
Document Title
Multiple On-Board Cryopump Connections
Helium Line Connections
CAUTION
Make sure the Compressor power is OFF before making any
connections to the rear panel.
1. Connect the Supply and Return lines to the 9600 Compressor as
described in “Connecting/Disconnecting Helium Flex Lines” in
this section.
2. Connect the Gas Return Line to the customer supplied helium
manifold and then to the GAS RETURN connector on the
On-Board Cryopump.
3. Connect the Gas Supply Line to the customer supplied helium
manifold and then to the GAS SUPPL
Y connector on the On-Board
Cryopump.
Power Cable Connections
1. Connect the On-Board Splitter Box power cable between the
CRYOPUMP ELECTRICAL OUTLET on the rear panel of the
Compressor and the On-Board Splitter Box power connector as
shown in Figure 3-6.
2. Connect the On-Board Cryopump or W
aterpump power cables to
the CRYOPUMP 1, 2, or 3 connectors on the On-Board Splitter
Box and the respective cryopumps as shown in Figure 3-6.
CAUTION
The use of several compressors on a single manifold feeding a
common supply header and a common return header requires special
precautions. Contact BROOKS-CRYOGENICS for a review of the
intended installation and for specific technical instructions. The use of
a 9600 compressor on a manifold with other BROOKS-
CRYOGENICS compressor models requires a reduction of the helium
charge pressure to 200 - 210 psig charge pressure to avoid helium
safety valves from inadvertently venting. Refer to “Section 4 -
Operation” and “Section 5 - Maintenance” for more information.
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