3-12 ©2013 Brooks Automation Inc. Pub. No. 8040444, Rev. AA, 01/14/2013 ECO No. 63723
NOTE: Your installation (number of pumps per compressor) will vary
based upon the On-Board Cryopump models used. Refer to “Appendix A:
Customer Brooks Automation Technical Support Information” to consult
your local BROOKS-CRYOGENICS Customer Support Center for
information on specific compressor/pump applications.
NOTE: The On-Board Splitter Box can be installed at the process tool
containing the pumps as shown in Figure 3-6, or on the rear of the
Compressor as shown in Figure 3-7. BROOKS-CRYOGENICS
recommends that the On-Board Splitter box be installed near the process
tool to reduce cable requirements.
Figure 3-6: Recommended Multiple On-Board Cryopump or Waterpump Installation
(Splitter Box located at Process Tool)
SUPPLY
RETURN
WATER
POWER
On-Board Power Cable
REMOTE
On-Board
Splitter Box
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