Brooks 9600 - Page 41

©2013 Brooks Automation Inc. Pub. No. 8040444, Rev. AA 01/14/2013 ECO No. 63723 3-13
Document Title
Figure 3-7:
SUPPLY
RETURN
WATER
POWER
REMOTE
On-Board Power Cables
On-Board
Splitter Box
Alternative Multiple On-Board Cryopump or Waterpump Installation
(Splitter Box located at Compressor)