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Brooks 9600 User Manual

Brooks 9600
70 pages
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9600 Compressor
Installation, Operation and
Maintenance Instructions
8040444 Revision AA

Table of Contents

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Brooks 9600 Specifications

General IconGeneral
BrandBrooks
Model9600
CategoryCompressor
LanguageEnglish

Summary

9600 Compressor Description

General Compressor Information

Provides an overview of the 9600 Compressor and its manual.

Compressor Configurations

Details supported cryopump types and connection options.

System Documentation

Describes the manuals provided for system components.

Helium Refrigeration System Overview

Explains the basic operation of the helium refrigeration cycle.

Compressor Specifications

Details dimensions, weight, electrical, and cooling water specs.

Component Description

Describes the components accessible from the rear panel.

Multiple On-Board Cryopump Connections

Details connecting multiple On-Board Cryopumps.

Multiple Cryo-Torr Cryopump Connections

Details connecting multiple Cryo-Torr Cryopumps.

Compressor Weight

Specifies the weight of the compressor unit.

Electrical Input Specifications

Details electrical input requirements and ratings.

Cooling Water Specifications

Specifies the requirements for cooling water.

System Circuit Breaker

Description of the system circuit breaker function.

Elapsed Time Meter

Details the function and operation of the elapsed time meter.

Control Circuit Breaker

Describes the control circuit breaker's overload protection.

Power ON Indicator

Explanation of the Power ON indicator light.

Gas Charge Flared Fitting

Details the gas charge flared fitting for helium supply.

Helium Pressure Gauge

Indicates system helium charge pressure.

Power Inlet

Connection point for the compressor power cable.

Return Gas Coupling

Coupling for returning helium to the compressor.

Cooling Water IN Connector

Connector for supplying cooling water to the compressor.

Cooling Water OUT Connector

Connector for returning cooling water from the compressor.

Cryopump Electrical Outlet

Provides power to cryopumps via splitter box or interface.

Compressor Remote Connector

Two-pin connector for remote compressor control.

Supply Gas Coupling

Connection for high pressure compressed helium.

Unpacking and Inspection

Introduction to Unpacking and Inspection

Overview of the unpacking and inspection process.

Shipping Carton Inspection

Procedures for inspecting the shipping carton for damage.

Removing Compressor from Shipping Carton

Step-by-step instructions for safely removing the compressor.

Compressor Inspection

Visual inspection of the compressor for damage and leaks.

Helium Pressure Verification (OFF Condition)

Verifying helium charge pressure when the compressor is off.

Shipping Carton Contents

Lists the items expected in the shipping carton.

Installation Procedures

Introduction to Installation

Overview of installation tasks for the compressor.

Water Line Connections

Instructions for connecting supply and return water lines.

Electrical Connections

Procedures for making three-phase electrical connections.

Power Cable Preparation

Steps for preparing the power cable for connection.

Phase Check Procedure

Verifying correct electrical phase connections.

Helium Flex Line Connections

Instructions for connecting and disconnecting helium flex lines.

Single On-Board Cryopump Connections

Connecting a single On-Board Cryopump to the compressor.

Single Cryo-Torr Cryopump Connections

Connecting a single Cryo-Torr Cryopump to the compressor.

Multiple On-Board Cryopump Connections

Connecting multiple On-Board Cryopumps.

Multiple Cryo-Torr Cryopump Connections

Connecting multiple Cryo-Torr Cryopumps.

Compressor Operation

Adjusting System Helium Pressure

Procedures for adjusting helium pressure for operation.

Helium Pressure Verification (OFF Condition)

Verifying helium charge pressure when the compressor is off.

Compressor Operation Procedures

Steps to start and operate the compressor.

Helium Circuit Component Replacement

Guidance on replacing components in the helium circuit.

Safety Conventions

Introduction to Safety Conventions

Explains safety conventions used in the manual.

Signal Word Descriptions

Defines signal words used for hazard warnings.

Safety Shape Descriptions

Explains safety shapes and their meanings.

Safety References

Lists relevant safety standards documents.

Maintenance

Scheduled Maintenance

Overview of scheduled maintenance tasks.

Suggested Maintenance Equipment

Lists recommended equipment and supplies for maintenance.

Adsorber Replacement

Procedure for replacing the adsorber cartridge.

Reducing Helium Pressure

Procedure for reducing system helium pressure.

Increasing Helium Pressure

Procedure for increasing system helium pressure.

Adding Helium

Steps for adding helium to the system.

Customer Technical Support Information

Technical Support Contact Numbers

List of phone numbers for technical support by region.

Flow Diagram

Troubleshooting Procedures

Troubleshooting the Compressor

Summarizes compressor troubleshooting procedures.

Technical Inquiries

Information on contacting support for technical inquiries.

Schematic Diagrams

Introduction to Schematics

Notes that the schematic supports the 9600 compressor.

Basic Control Assembly Legend

Legend for components in the basic control assembly.

On-Board/Cryo Electrical Module Legend

Legend for the On-Board/Cryo electrical module.

On-Board Output Module Legend

Legend for the On-Board output module.