3-8 ©2013 Brooks Automation Inc. Pub. No. 8040444, Rev. AA, 01/14/2013 ECO No. 63723
leakage.
This 1 3/16 in. wrench
is used to turn the self
sealing coupling
This 1 1/8 in. wrench
holds the coupling in a
stationary position.
Side View
To Tighten Coupling Halves
Hold Here
Turn Here
Hold Here
Turn Here
To Loosen Coupling Halves
Figure 3-3: Connecting/Disconnecting Helium Flex Line Couplings
Single On-Board Cryopump Connections
CAUTION
Make sure the Compressor power is OFF before making any
connections to the rear panel.
1. Connect the Supply and Return lines to the 9600 Compressor as
described in “Connecting/Disconnecting Helium Flex Lines” in
this section.
2. Connect one end of the Cryopump cold head cable to the
CRYOPUMP ELECTRICAL OUTLET on the rear panel of the
Compressor as shown in Figure 3-4.
3. Connect the opposite end of the cold head cable to the cryopump
cold head cable connector.
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