Brooks 9600 - Page 38

3-10 ©2013 Brooks Automation Inc. Pub. No. 8040444, Rev. AA, 01/14/2013 ECO No. 63723
Figure 3-5: Single Cryo-Torr Cryopump Installation
Cryo-Torr
Power Cable
SUPPLY
RETURN
WATER
POWER
REMOTE