©2013 Brooks Automation Inc. Pub. No. 8040444, Rev. AA, 01/14/2013 ECO No. 63723 1-13
9600 Compressor Installation, Operation and Maintenance Instructions
Figure 1-6: 9600 Compressor Connected to Multiple Cryo-Torr Cryopumps
NOTE: Your installation (number of pumps per compressor) will vary
based upon the Cryo-Torr Cryopump models used. Refer to “Appendix A:
Customer Brooks Automation Technical Support Information”to consult
your local BROOKS-CRYOGENICS Customer Support Center for
information on specific compressor/cryopump applications.
Cryopump Electrical Input
User Remote
(from vacuum system)
SUPPLY
RETURN
WATER
POWER
Cryo-Torr
Interface
Remote
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