©2013 Brooks Automation Inc. Pub. No. 8040444, Rev. AA, 01/14/2013 ECO No. 63723 C-3
Document Title
3) System circuit breaker
(CB1) will not remain in
the ON (1) position when
switched ON. The Control
Circuit circuit breaker
(CB2) trips when exces-
sive current is being drawn
by the cold head or 24 volt
compressor control cir-
cuits.
1) Damaged On-Board power
cable, connectors, or drive
motor.
2) Damaged component in the
compressor power or control
circuit.
1) Check for compressor oper-
ation with cryopump cable
disconnected from compres-
sor. Refer to
“Appendix A:
Customer Brooks Auto-
mation Technical Support
Information” to contact the
Customer Support Center if
the compressor operates
improperly.
2) Refer to
“Appendix A:
Customer Brooks Auto-
mation Technical Sup-
port Information” to
contact the Customer Sup-
port Center.
4) System circuit breaker
(CB1) remains in the ON
(1) position and the com-
pressor stops after several
minutes of operation and
remains OFF (0).
1) Thermal protective switches
are open.
3) Very cold water has caused a
restriction of oil flow through
the oil injection orifice dur-
ing start-up.
1) Check for inadequate water
cooling. Refer to
Table 1-3.
3) Recheck for proper cooling
water temperature. Refer to
Table 1-3. Restart compres-
sor repeatedly until continu-
ous operation is achieved.
5) System circuit breaker
(CB1) trips after a period
of running.
1) Loss or degradation of power
from the source.
2) Defective motor windings.
1) Check that line voltage is
correct on all phases.
2) Check running current on all
phases.
3) Refer to
“Appendix A:
Customer Brooks Auto-
mation Technical Sup-
port Information” to
contact the local Customer
Support Center.
Table C-1: Compressor Troubleshooting Procedures (Continued)
Problem Possible Cause Corrective Action
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