Dear Customer,
We recommend that you read this manual in its entirety as this will enable efficient and proper use of the
EtherCAT® thermal mass flow controllers and meters. Should you require any additional information concerning
the EtherCAT thermal mass flow controllers and meters, please feel free to contact your local Brooks Sales and
Service Office; see back cover for contact information, or visit us on the web at www.BrooksInstrument.com. We
appreciate this opportunity to service your fluid measurement and control requirements, and trust that we will be
able to provide you with further assistance in the future.
Yours sincerely,
Brooks Instrument
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