Brooks GF Series Supplemental Manual

Installation and Operation Manual
X-DPT-EtherCAT-GF1XX-MFC-eng
Part Number: 541B219AAG
April, 2017
vi
Brooks EtherCAT MFCs
4.1. Error and Warning Condition Descriptions .............................................................................. 44
4.1.1. Non-Volatile Memory Failures (Display Codes 1,2,3) ............................................. 45
4.1.2. Network Interface Failure (Display Code 4) ............................................................ 45
4.1.3. Selected Calibration Invalid (Display Code 5) ......................................................... 45
4.1.4. Identity Information Mismatch (Display Code 6) ..................................................... 45
4.1.5. Hardware Incompatibility (Display Code 7) ............................................................. 46
4.1.6. Flow Sensor Failure & Error (Display Code 10 and 110) ........................................ 46
4.1.7. Flow Sensor Cooling Recovery (Display Code 111) ............................................... 46
4.1.8. Excessive Drift (Display Code 112) ......................................................................... 46
4.1.9. Process Flow Out of Range (Display Codes 115 and 116) ..................................... 46
4.1.10. Pressure Sensor Error (Display Code 120) ........................................................... 47
4.1.11. Process Pressure Out of Range (Display Codes 125 and 126) ............................ 47
4.1.12. Temperature Sensor Failure & Error (Display Code 130 and 10) ......................... 47
4.1.13. Temperature Out of Range (Display Codes 135 and 136) .................................... 48
4.1.14. Excessive Leak-By (Display Code 142) ................................................................ 48
4.1.15. Control Deviation Out of Limits (Display Code 145) .............................................. 48
4.1.16. Temperature Stability (Display Code 230) ............................................................ 49
4.1.17. Mounting Orientation Alert (Display Code 251) ..................................................... 49
4.1.18. Voltage Input Out of Limits (Display Code 260) .................................................... 49
4.1.19. Totalizer Overflow Alert (Display Code 270) ......................................................... 49
4.1.20. Warm-up (Display Code 299) ................................................................................ 49
4.1.21. Device ID Switch Changed Alert (No Display Code) ............................................. 50
5. Appendix ................................................................................................................................................ 51
5.1. Ramping Feature ..................................................................................................................... 51

Brooks GF Series Specifications

General

Brand	Brooks
Model	GF Series
Category	Controller
Language	English