DOD CLPX - Appendix E - Gas Specifications

C L
P X
U S E R S G U I D E
D O D
T E C H N O L O G I E S , I N C
Rev 12.109 Page 29
Appendix E - Gas Specifications
TLV = Threshold Limit Value LDL = Lower Detectable Limit
Gas Description Units TLV Full Scale LDL
Alarm 1
Default
Alarm 2
Default
Cassette
Part #
TDI TDI ppb 5.0 200.0 1.1 5.0 10.0
1-600-020
MDI MDI ppb 5.0 200.0 1.0 5.0 10.0
1-600-070
HDI HDI ppb 5.0 200.0 2.6 5.0 10.0
1-600-070
IPDI IPDI ppb 5.0 200.0 3.0 5.0 10.0
1-600-070
AsH3 Low Level Arsine ppb 5.0 50.0 1.7 5.0 10.0
1-300-070
AsH3 Arsine ppb 5.0 500.0 2.2 50.0 100.0
1-300-070
PH3 Phosphine ppb 300.0 1500.0 5.0 300.0 600.0
1-300-070
B2H6 Diborane ppb 100.0 1000.0 14.9 100.0 200.0
1-300-070
SiH4 Silane ppm 5.0 50.0 0.2 5.0 10.0
1-300-070
H2SE Hydrogen Selenide ppb 50.0 500.0 18.2 50.0 100.0
1-300-070
H2S Low Level Hydrogen Sulfide ppb 1000.0 90.0 16.7 25.0 50.0
1-300-070
H2S Hydrogen Sulfide ppm 1.0 20.0 0.3 1.0 2.0
1-300-070
HCL Hydrochloric Acid ppm 2.0 15.0 0.2 2.0 4.0
1-400-070
HF Hydrogen Fluoride ppm 2.0 10.0 0.4 2.0 4.0
1-400-070
BF3 Boron Tri Fluoride ppb 1000.0 5000.0 90.1 1000.0 2000.0
1-400-070
HBR Hydrogen Bromide ppm 3.0 20.0 0.3 3.0 6.0
1-400-070
NH3 Ammonia ppm 25.0 75.0 1.9 25.0 50.0
1-700-070
CL2 Chlorine ppb 500.0 5000.0 39.5 500.0 1000.0
1-500-070
N2H4 Hydrazine ppb 10.0 500.0 8.0 20.0 40.0
1-D11-070
CoCL2 Phosgene ppb 100.0 90.0 4.9 10.0 20.0
1-200-070
CoCL2 Phosgene ppb 100.0 3000.0 5.3 100.0 200.0
1-200-070
CL2 Chlorine ppb 500.0 5000.0 70.1 500.0 1000.0
1-400-070
CL2 Low Level Chlorine ppb 500.0 20.0 1.0 5.0 10.0
1-500-075
H2SO4 Sulfuric Acid ppb 50.0 750.0 23.3 50.0 100.0
1-400-070
GeH4 Germane ppb 200.0 2000.0 98.3 200.0 400.0
1-300-070
HNO3 Nitric Acid ppb 2000.0 6000.0 12.5 2000.0 4000.0
1-400-075
DMDC Velcorin ppb 40.0 500.0 14.9 50.0 100.0
1-200-075