SCU-1600 Control Unit for Turbomolecular Pump
March 10 95 Issue 1-a
5
SERIAL COMMUNICATION PROTOCOL
Example:
Pump operation mode : 01
hex
= 1 = Levitation
WARNING being detected : 0098
hex
= 0008
hex
OR 0010
hex
OR 0080
hex
=
3 warnings of "WARNING: Imbalance X_H", "WARNING:
Imbalance X_B" and "WARNING: Pump Overload"
The number of error : 02
hex
= 2 errors
Error 1 : 0D
hex
= 13 = Disturbance Xh
Error 2 : 0F
hex
= 15 = Disturbance Xb
Error 3 to 32 : 00
hex
= No error detected
Parameter 1 2 3 4 5 6 7 8 9 10
ASCII
0 1 0 0 9 8 0 2 0 D 0 F 0 0 0 0 0 0 0 0 0 0
HEX
30 31 30 30 39 38 30 32 30 44 30 46 30 30 30 30 30 30 30 30 30 30
Parameter 11 12 13 14 15 30 31 32 33 34
ASCII
0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0
HEX
30 30 30 30 30 30 30 30 30 30
[Omitted]
30 30 30 30 30 30 30 30 30 30
Parameter 35
ASCII
0 0
HEX
30 30