Edwards SCU-1600

SCU-1600 Control Unit for Turbomolecular Pump
March 10 110 Issue 1-a
7
MAINTENANCE
7.3 "WARNING" message description
7.3.1 Damage point function
Impact of the STP pump rotor onto the touch-down bearing, such as by an unexpected in-rush of air
from outside or in the event of power failure, can damage the touch-down bearings. The SCU-1600
monitors these impacts and assigns damage points to the event of "Disturbance" or "Mains Failure".
The damage point increases with the rotational speed up to 15 point for each "Disturbance", and 1
point for each touch-down at "Mains Failure".
Refer to Section 3.10, "Confirmation Mode" about confirmation method of damage point.
Warning message
STP pump
First Damage Limit Second Damage Limit
STP-A2203 series
STP-A2503/A3003 series
STP-F2203 series
120 or more 150 or more
STP-A2803/A3503 series
STP-XA2703/A3203 series
STP-XA4503 series
STP-XW3503 series
45 or more 60 or more
STP-XH2603/XH3203 series 72 or more 90 or more
Table 34 - Accumulated damage point and warning message
7.3.2 First damage limit
"First Damage Limit" is displayed when the accumulation point attains the setting value shown in
Table 34. The rotating operation can be performed though "WARNING" message is displayed. It is
recommended to have the STP pump overhauled as soon as possible.
7.3.3 Second damage limit
"Second Damage Limit" is displayed when continuing to operate the STP pump after "First Damage
Limit" is displayed and the accumulation of the damage point attains the setting value by further
"Disturbance" and "Mains Failure".
Overhaul the STP pump because the STP pump cannot perform the rotational operation when
"Second Damage Limit" is displayed.
When operating the STP pump is needed after "Second Damage Limit" is displayed, disable the
"Second Damage Limit". The rotating operation can be performed even though the "WARNING"
message is displayed. Refer to Section 3.11 for the setting method.