SCU-1600 Control Unit for Turbomolecular Pump
March 10 45 Issue 1-a
3
INSTALLATION
3.12 Manual operation mode
The operation of the TMS heater, TMS water valve and the emergency vent valve can be inspected in
manual operation mode. However, the manual operation cannot be performed during the remote
operation.
1. Press the "DOWN" and "SELECT" switches simultaneously to enter Manual Mode, then "Manual
Operation TMS Heater OFF" is displayed.
2. Press "UP" switch to display "TMS Heater ON", and the TMS Heater output turns "ON".
Press "DOWN" switch to display "TMS Heater OFF", and the TMS Heater output turns "OFF".
3. Press "SELECT" switch to display "TMS Water Valve Close", and the TMS water valve can be
operated manually with "UP" and "DOWN" switches.
4. Press "SELECT" switch to display "Leak Valve Close" and the emergency vent valve can be
operated manually with "UP" and "DOWN" switches.
5. Press "SELECT" switch in the Emergency vent valve operation to return to the Operation Mode.
Figure 29 - Manual operation method
A. Operation mode C. TMS water valve
B. TMS heater D. Emergency vent valve
A
B
C
D
UP DOWN
ENTER
SELECT
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