EasyManua.ls Logo

Edwards SCU-1600

Edwards SCU-1600
143 pages
To Next Page IconTo Next Page
To Next Page IconTo Next Page
To Previous Page IconTo Previous Page
To Previous Page IconTo Previous Page
Loading...
SCU-1600 Control Unit for Turbomolecular Pump
March 10 7 Issue 1-a
1
INTRODUCTION
1.6.1 Cable sets
The following cable sets (optional accessories) are used with the SCU-1600 and STP pump:
STP connection cable - STP pump to SCU-1600.
TMS cable - STP pump to built-in TMS unit in the SCU-1600.
Power cable - SCU-1600 to power supply.
Note: Figure 8 shows a typical TMS system installation. System connections and cables differ
according to the type of pump connected to the SCU-1600. Refer to the STP pump Instruction
Manual (A) and (B) for full details of connection cables and system connections.
1 SCU-1600 control unit 5 TMS valve cable
2 STP connection cable 6 TMS connection cable
3 TMS sensor cable 7 Power cable
4 TMS heater cable
Figure 8 - Configuration of the STP pump with the TMS
1
2
3
4
5
6
7

Table of Contents

Related product manuals