Edwards SCU-1600

SCU-1600 Control Unit for Turbomolecular Pump
March 10 23 Issue 1-a
3
INSTALLATION
6
5
.
3
1
7
1
8
2
1
.
7
49
φ21.5
98
φ31
L m
+5 %
-0 %
1
0
0
200
maxφ10
SCU-1600 side STP pump side
1 SCU-1600 connection
2 TMS heater cable connection
3 TMS valve cable connection
Figure 16 - TMS connection cable (without sensor cable)
maxφ10
98
φ31
L m
+5 %
-0 %
200
6
5
.
3
1
0
0
150 32
φ12
49
φ21.5
1
7
1
8
2
1
.
7
SCU-1600 side STP pump side
1 SCU-1600 connection
2 TMS heater cable connection
3 TMS valve cable connection
4 TMS sensor cable connection
Figure 17 - TMS connection cable (with sensor cable)
1
3
2
1
3
2
4