Edwards SCU-1600

SCU-1600 Control Unit for Turbomolecular Pump
March 10 22 Issue 1-a
3
INSTALLATION
3.6.2 TMS connection cable
Connect the plug (pin) side of the TMS connection cable to the "TMS X5" of the TMS control unit.
The SCU-1600 TMS unit is used with specified STP pumps. Refer to the STP pump Instruction Manual
(B) for the cable connection method.
Note: Figure 15 to Figure 17 show typical TMS cables. For details of the TMS cable used with the
connected pump module, refer to the STP pump Instruction Manual (B).
SCU-1600 side STP pump side
1 SCU-1600 connection
2 TMS valve cable connection
3 TMS heater cable connection
4 TMS sensor cable connection
Figure 15 - TMS connection cable (with distribution box)
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