SCU-1600 Control Unit for Turbomolecular Pump
March 10 64 Issue 1-a
4
OPERATION
4.7 Operating the TMS unit (for use with the TMS unit)
4.7.1 Before starting
Check the following items before starting:
1. Check that the TMS connection cable is securely connected to the SCU-1600.
2. Check that the TMS heater, the TMS valve, the cooling water pipe and the TMS sensor cable are
securely connected.
Note: The TMS sensor cable is not required depend on the type of the STP pump.
4.7.2 Starting/Stopping
Power on the STP pump to automatically start the TMS unit.
Power off the STP pump to automatically stop the TMS unit.
While the TMS unit is in operation, the "TEMP CTRL" LED illuminates on the SCU-1600.
When STP pump is in the power ON state, the TMS unit operates regardless of the status of the
SCU-1600. When the STP pump is the cause of the malfunction, the TMS unit is stopped.
4.7.3 Setting the TMS unit function
When the "TEMP CTRL" LED does not illuminate on the SCU-1600, after switching MAIN POWER
"ON", the TMS function may be set to "DISABLE". Confirm and reset the TMS function according to
Section 3.11.
4.7.4 Temperature control
When the temperature of the STP pump base is lower than the setting value, the TMS heater is turned
"ON", and the TMS valve is turned "OFF" to heat the STP pump. When the temperature of the STP
pump base is higher than the setting value, the TMS heater is turned "OFF", and the TMS valve is
turned "ON" to cool the STP pump. The LCD displays the actual temperature of the STP pump base as
"TMS TEMP: ** ºC".
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