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Edwards SCU-1600

Edwards SCU-1600
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SCU-1600 Control Unit for Turbomolecular Pump
March 10 16 Issue 1-a
3
INSTALLATION
3.3 Rear panel
1 AC POWER X2 5 P.CONNECTOR X1
2 MAIN POWER breaker 6 REMOTE X7
3 MOTOR X4 7 TMS X5
4 Serial port COM1 X3A, X3B 8 Ground terminal
Figure 11 - SCU-1600 rear panel
WARNING
A hazardous live voltage may exist at the connectors that are marked with the
warning sign
. DO NOT touch the terminal. Doing so may result in electric shock.
When connecting/disconnecting the connecter, always power off the SCU-1600 (turn
the MAIN POWER "OFF") and isolate (Lockout/Tagout) the electrical energy source,
water and gas, and other energy sources on the vacuum equipment.
Item Description Function
1 AC POWER X2 Main power connection (240 Va.c. maximum)
2 MAIN POWER breaker Main power circuit breaker
3 MOTOR X4 STP motor connection (80 Va.c. maximum)
4 Serial Port COM1 X3A/X3B Serial communication connection RS232/RS485 (shard use)
5 P.CONNNECTOR X1 STP pump connection (58 Va.c. maximum)
6 REMOTE X7 Remote connection (125 Va.c. maximum)
RS485 serial communication (COM2)
7 TMS X5 TMS unit connection (240 Va.c. maximum)
8 Ground terminal Ground (Earth) connection terminal
Table 4 - SCU-1600 rear panel connection
1
2
3
5
76
4
8

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