SCU-1600 Control Unit for Turbomolecular Pump
March 10 21 Issue 1-a
3
INSTALLATION
3.6.1 STP connection cable
Connect the receptacle (socket) side of the STP connection cable to the STP connector on the STP
pump and connect the plug (pin) side to "P.CONNECTOR X1" and "MOTOR X4" on the SCU-1600.
29
φ20.6
105
68
φ32.5
99
105
100
φ5 4
97
φ54
SCU-1600 side STP pump side
1 60 pin (pin) 2 8 pin (pin) 3 60 pin (socket) 4 60 pin (socket, L-Type connector)
Figure 14 - STP pump connection cable
1
4
3
2