Edwards SCU-1600

SCU-1600 Control Unit for Turbomolecular Pump
March 10 113 Issue 1-a
7
MAINTENANCE
7.4 "WARNING" function setting
The following "WARNING" functions can be set to Enable or Disable. Refer to Section 3.11,
"Parameter Set Mode" for the setting method. See Table 35 and Table 36 for the default setting.
Message Default setting User setting
User setting
change
(threshold)
WARNING
First Damage Limit
Enable Enable Disable
WARNING
Second Damage Limit
Enable Enable Disable
WARNING
Imbalance X_H,
Imbalance X_B,
Imbalance Z
Enable Enable Disable
WARNING
Pump Run Time Over
Disable Enable Enable
WARNING
Pump Overload
Disable Enable Enable
WARNING
Low RTC Battery
Enable Disable Disable
Table 35 - Default setting of "WARNING" function
Message Default setting User setting
User setting change
(threshold)
WARNING
Pump Run Time Over
0 hour 0 to 30 million
hours
It can be set in units of
100 hours. 0 is not
counted.
WARNING
Pump Overload
Motor current
100% 0 to 100%
The ratio to the rated
current value. Smaller
value has high possibility
to get "WARNING".
Rotational
speed
0% 0 to 100% The rate to the rated
current value. Larger
value has high possibility
to get "WARNING".
Table 36 - Factory setting and variable range