Edwards SCU-1600

SCU-1600 Control Unit for Turbomolecular Pump
March 10 53 Issue 1-a
4
OPERATION
Pin Description
Pins for inputting the second speed select signal (valid in both
MANUAL and REMOTE operations).
When pins (1)-(23) are set to close, rotational speed will be
second speed in the normal state.
When using this function, set the second speed option to the
"ENABLE" (Parallel port operation) (see Section 3.11,
"Parameter set mode").
(18), (36) For the serial communication of the R485 (COM2). See Section
5, "Serial Communication Protocol" for details.
These pins are not used. (2), (19), (20), (31), (34)
CAUTION
DO NOT connect anything to these pins. Doing so may damage
the SCU-1600 or the vacuum equipment.
Table 9 - REMOTE X7 input signal pins (continued)
(23)
OPT2 IN