Edwards SCU-1600

SCU-1600 Control Unit for Turbomolecular Pump
March 10 83 Issue 1-a
5
SERIAL COMMUNICATION PROTOCOL
Error message Value Error message Value
Ram error 0 DSP->PCB Com Fail 33
Eeprom Error 1 PCB->DSP Com Fail 34
TMS Higher Temp 2 TMS Sensor Lost 35
TMS Breaker Trip 3 Tuning Error 1 36
TMS Overheat 4 Tuning Error 2 37
Mains Failure 5 Tuning Error 3 38
Power Supply Failure 6 Tuning Error 4 39
Overspeed 1 7 Tuning Error 5 40
Driver Overvoltage 8 ATMP Failure 41
CAUTION: CNT heat 1 9
*1
RTMP Failure 42
CNT Overheat 1 10 Imbalance X_H 43
*1
Driver Overcurrent 11 Imbalance X_B 44
*1
Driver Overload 12 Imbalance Z 45
*1
Disturbance X_H 13 Tuning Error 6 46
Disturbance Y_H 14 Tuning Error 7 47
Disturbance X_B 15 Tuning Error 8 48
Disturbance Y_B 16 Tuning Error 9 49
Disturbance Z 17 Driver Failure 50
Motor Overheat 18 R-Unit Failure 51
CAUTION: CNT Heat 2 19
*1
Motor Resistor Lost 52
CNT Overheat 2 20 Driver PWM Trouble 53
T.Cable Disconnected 21 Driver FAN Failure 54
P.Cable Disconnected 22 Driver CPU Error 55
E.Valve Disconnect 23 R-Unit Com. Failure 56
Driver Com. Failure 24 Amp Overcurrent 57
First Damage Limit 25
*1
DSP Initialize Fail 58
Second Damage Limit 26 Accel Malfunction 59
START NOT ALLOWED 27 Pump Record Failure 60
Speed Pulse Lost 28 PCB Record Failure 61
Overspeed 2 29 Tuning Error 10 62
Overspeed 3 30 Tuning Error 11 63
M_Temp Sensor Lost 31 Tuning Error 12 64
TMS Lower temp 32 Tuning Error 13 65
Table 24 - Error message values