Edwards SCU-1600

SCU-1600 Control Unit for Turbomolecular Pump
March 10 114 Issue 1-a
7
MAINTENANCE
7.5 Error at self test state
When an abnormality/error occurs during the self test while operating the ON switch, the safety
function operates, the "FAILURE" LED illuminates and an alarm signal is output from the REMOTE X7
connector (see Table 9). An error message showing "CAUTION" on the upper line and the contents of
the error are displayed on the lower line of the LCD. If an abnormality/error is found, take measures in
accordance with Table 37.
LCD Messages Probable causes Countermeasures
Referred
section
CAUTION
Coupling is Changed
The different STP pump is
used after the tuning is
performed.
Perform tuning. Section 4.2.2
Section 3.9.1
CAUTION
Different Pump ID
Failure of the SCU-1600 or
STP pump.
Contact Service office.
CAUTION
PCB is Initialized
Failure of the SCU-1600. Contact Service office.
CAUTION
Pump is Initialized
Failure of the SCU-1600 or
STP pump.
Contact Service office.
CAUTION
Pump Type is Changed
The STP pump of a different
model is used after the
tuning is performed.
Perform tuning. Section 4.2.2
Section 3.9.1
CAUTION
Pump&PCB are
Initialized
Failure of the SCU-1600 or
STP pump.
Contact Service office.
CAUTION
PumpType is Mismatch
The inappropriate STP pump
is used.
Confirm if the appropriate
STP pump is connected.
Section 2.1
CAUTION
Tuning Error 1
:
:
Tuning Error 9
Tuning failure After turning OFF and ON,
perform turning.
If the RESET operation does
not reset error message,
contact Service office.
Section 3.9.1
Motor Resistor Lost Motor resistance
measurement is impossible.
After turning OFF, connect
the STP motor connection
cable correctly. Perform
tuning after power ON
operation. If the RESET
operation does not reset
error message, contact
Service office.
3.9.1
3.6.1
3.3
CAUTION
Tuning Not Completed
Turning is not completed. Perform tuning. Section 3.9.1
Please contact
a service centre
The control parameter is not
in the memory of the STP
pump.
Contact Service office.
Table 37 - Error messages at self test state