Edwards SCU-1600

SCU-1600 Control Unit for Turbomolecular Pump
March 10 124 Issue 1-a
7
MAINTENANCE
7.6 When error message is not displayed on LCD
When the "FAILURE" LED illuminates and the LCD displays an error message, refer to Table 38 to
Table 44.
7.6.1 Abnormalities when powering ON
No. Symptom Probable cause Countermeasures Referred section
Incorrect connection of
power cable.
Connect the power cable
correctly.
Section 3.6.3
Abnormal power
voltage.
Set the voltage to rated voltage
±10%.
Section 2.1
Section 3.6.3
1 The "POWER"
LED does not
illuminate.
Power failure. Check if a power failure has
occurred.
Section 7.1.1
Table 45 - Troubleshooting when powering ON
7.6.2 Abnormalities when performing rotational operation
No. Symptom Probable causes Countermeasures Referred section
The "MANUAL/
REMOTE"
changeover switch is
not in the correct
position.
Slide the "MANUAL/ REMOTE"
changeover switch to the correct
position.
Section 3.2
Section 4.4
Section 4.5
1 The "ACCEL."
LED does not
illuminate.
Rotation INHIBIT
signal input pins
(REMOTE X7 (1)-(5))
are open.
When not using this function,
short the circuit between (1)-(5),
or set "Inhibit Command" to
"DISABLE".
If these pins are open, the STP
pump will not rotate after
performing the start operation.
Section 4.5.1
Section 3.11
Table 46 - Troubleshooting when performing the STP pump start operation