SCU-1600 Control Unit for Turbomolecular Pump
March 10 3 Issue 1-a
1
INTRODUCTION
5. Defect resulting from the not-specified use of the product.
6. When the product is used under special conditions without obtaining the written consent of
Edwards (strong magnetic field and the radiation are added to the product).
7. Defect resulting from the installation of the product (exclude the installation by authorized
personnel).
8. Deterioration in the external because of use (discoloration, scratches and so forth).
9. Product damage occurred during transport or other factors not attributable to Edwards.
10. Product breakage or damage due to natural disasters, fire or other external factors.
11. Deterioration in the basic performance due to the use of the product beyond limits of the use.
12. Any direct, incidental or consequential damage resulting from the use of the product.
13. When continuously operated without overhaul after the WARNING indication ("WARNING"
message) on the LCD.
14. Overhaul and replacement of maintenance parts.
1.3.4 Spare parts
• Air-cooling fan for SCU-1600. (When exchanging, contact Service Office).
1.4 Labels
The following labels are affixed or printed to the SCU-1600. Read the contents of the labels before
operation.
1. High voltage device caution label
The SCU-1600 is equipped with a high voltage device. This label warns operators to pay
attention to the high voltage device at the maintenance and inspection.
Figure 1 - High voltage device caution label
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